Description MF5000 series mass flow meters
MF5000 series mass flow meters are specially designed for small
pipe flow monitoring and control. The series can measure gas flow
in a pipe diameter as small as 3 mm,but not over 19 mm. With the
self-flow conditioning feature of the MEMS sensor package, the
meters feature an extremely low pressure loss compared to the
traditional by-pass thermal mass flow meters in this application
scope. The accuracy of the meters are generally ±(1.5+0.2FS)% or
better depending on the requests. The meters can work at an
environment of -20 to 60 C and pressure up to 1.5 MPa. Applications
include semiconductor gas process monitoring and control, hospital
oxygen gas monitoring, etc.
Specification MF5000 series mass flow meters
Accuracy: ±(1.5+0.5FS)%
Environment Temperature: -20 ~ +60 oC
Humidity: < 95 %RH (No icing or condensation)
Flow channel :3 ~ 19 mm
Display: Flowrate and accumulated flow
Interface:4 ~ 20 mA; RS485; Pulse
Calibration:Air @ 20 oC, 101.325 kPa
Protection: IP40 (Without Ex proof model); IP66 (With Ex proof
model)
Ex PrOof: Ex d IIC T4
Detailed Images MF5000 series mass flow meters
Mechanical Dimensions MF5000 series mass flow meters
Features of MF5000 series mass flow meters
Highly sensitive, measuring as low as 8 mm/sec, and as high as 65
m/sec with a single assembly
Directly sense mass flow using thermal mass flow principle
Proprietary MEMS sensor package design for better reliability
Standard 12 ~ 24 Vdc power supply
Low pressure loss forreducing energy cost
Industrial standard Modbus protocol for easy networking and remote
control
Selection Guide of MF5000 series mass flow meters
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