MEMS Mass flow Meter MF4700 series
1. Introduction
MF4700 series mass flow meters are made with siargo’s proprietary,
MEMS sensing technology applies for clean,and,dry, gas,metering and
control.
The meter is designed with the structure of a rotameter but with
the full capability of a digital gas mass flow metrology and LEC
display instant and accumulated flowrate can be read and displayed.
The front buttons let user to access and adjust the parameters as
well as stored data The standard Rs485 Modbus enables the remote
access and integration.
2. Features:
•Direct mass flow measurement with high accuracy
•Multiple sensing elements for extended range ability over 1OO:1
•Easy remote accessible user interface with RS485 Modbus and/or
linearized analog data
•Bright LED display for instant and accunulated flowrate with
on-site access via front buttons
•Record flowrate patterns with over range indication
•Easy for remote communication and integration
•Compatible with traditional rotameter mechanical connections
•Flow range and mechanical dimensions can be fully customized
3.Connection:
| N* |
| MF4701 (100, 200, 500 sccm) | 2-NPT 1/8, 2-BSPT 1/8 |
| MF4703(1,2,5SLPM) | 2-NPT 1/8, 2-BSPT 1/8 |
| MF4708 (10, 20, 50SLPM) | 2-NPT3/8, 2-BSPT3/8 |
4. Technical data Sheet
| Parameters | MF4701 MF4703 MF4708 | Units |
| FlowRange | 0~ 100,200,500 0~1,2,5 0~10, 20, 50 | sccm SLPM |
| Rangeability | 50:1 | |
| Accuracy | ±(2.5+0.5FS) | % |
| Repeatability | ±0.8 | % |
| Offset stability | 0.1 | %FS |
| Span stability | ±0.12 | %/oC |
| Response time | 10 (default, can be changed via button) | msec |
| Power supply | 8~24Vdc, 50mA max. | |
| Output | Analog, RS232/RS485 (Modbus) | |
| Display | LED with 2 indicators | |
| Display units | Instant flow: sccm/SLPM; Accumulated flow: SL | |
| Resolution | 0.001, 0.01, 0.1,1 unit, selectable | |
| Pressure loss | 100 | Pa |
| Max pressure | 0.5 | MPa |
| Temperature | -10~+55 | °C |
| Storage | -20~+65 | °C |
| Humidity | <95%RH, no condensation | |
| Mechanical | NPTorBSPT | |
| Key board | 3 keys | |
| Electrical | 5 pins, CD R-5 | |
| Calibration | Air(20°C,101.325 kPa) | |
Contact us:
Emma Zhao
Mobile/What'sapp/WeChat: +86 18629367136
Skype: emma02281
Email: zoe.wang@369yb.com sales.c@7deadweighttester.com
Tel: + 86-029-88639233
Fax: +86 029 88622793
Xi’an Yunyi Instrument Co., Ltd.
Add:Room B1203, Inland Port Mansion, No.9 Gangwu Road, Xi'an
International Trade & Logistics Park, Xi'an 710026 China
