Product Overview
Silicon Carbide Ceramic Rings are precision-engineered components
manufactured from high-purity silicon carbide (SiC) ceramics. With
outstanding properties including high-temperature resistance,
excellent corrosion resistance, high mechanical strength, and
superior wear resistance, SiC ceramic rings are widely used in
semiconductor manufacturing equipment, vacuum systems,
high-temperature furnaces, and precision industrial applications.
Through advanced forming, sintering, and precision machining
processes, these components can achieve tight dimensional
tolerances, complex geometries, and excellent surface finishes to
meet demanding industrial requirements.
Key Features
1. Excellent High-Temperature Performance
- Withstands high-temperature environments up to 1600°C+ depending on material grade and application conditions
- Maintains mechanical strength and dimensional stability at elevated
temperatures
- Ideal for thermal processing, epitaxy, diffusion, and
high-temperature furnace applications
2. High Purity and Low Contamination
- Manufactured from high-purity silicon carbide materials
- Low particle generation and minimal metallic contamination
- Suitable for semiconductor cleanroom environments and wafer
processing applications
3. Outstanding Corrosion Resistance
- Excellent resistance to acids, alkalis, and plasma environments
- Stable performance against aggressive process gases such as Cl₂, HCl, and NF₃
- Suitable for semiconductor etching, CVD, and PVD equipment
4. High Mechanical Strength and Wear Resistance
- Mohs hardness of approximately 9
- Excellent abrasion resistance for long service life
- Suitable for precision support structures and mechanical components
5. Precision Machining Capability
Available machining processes include:
- Outer diameter and inner diameter machining
- Precision grinding and polishing
- Tight dimensional and geometric tolerance control
- Customized complex structures
Product Specifications
| Parameter | Specification |
|---|
| Material | Silicon Carbide (SiC) |
| Material Type | Sintered SiC / Reaction Bonded SiC |
| Color | Black / Dark Gray |
| Outer Diameter | Customized |
| Inner Diameter | Customized |
| Thickness | Customized |
| Surface Roughness | Ra ≤0.5 μm (customizable) |
| Maximum Operating Temperature | Up to 1600°C |
| Density | 3.0–3.2 g/cm³ |
| Hardness | ≥HV2000 |
Applications
Semiconductor Manufacturing Equipment
- Wafer support rings
- Semiconductor chamber components
- CVD / PECVD equipment parts
- Epitaxial growth furnace components
- RTP (Rapid Thermal Processing) components
- Wafer handling and support systems
Photovoltaic Industry
- High-temperature furnace components
- Thermal processing fixtures
- Silicon wafer support parts
Vacuum and High-Temperature Systems
- Vacuum furnace components
- Heating system supports
- Thermal insulation structures
Precision Industrial Applications
- Wear-resistant sealing rings
- Pump components
- Positioning and support components
FAQ – Silicon Carbide Ceramic Ring (SiC Ceramic Ring)
Q1: What is a Silicon Carbide Ceramic Ring?
A: A Silicon Carbide Ceramic Ring is a precision ceramic component
manufactured from high-purity silicon carbide (SiC). It features
excellent high-temperature resistance, corrosion resistance,
mechanical strength, and wear resistance, making it suitable for
semiconductor equipment, vacuum systems, and high-temperature
applications.
Q2: What are the main advantages of SiC ceramic rings?
A: SiC ceramic rings offer several advantages:
- Excellent high-temperature stability (up to 1600°C+ depending on
material grade)
- Superior resistance to plasma and chemical corrosion
- High hardness and wear resistance
- Low thermal expansion and excellent dimensional stability
- Low particle generation for semiconductor applications
Q3: What industries use Silicon Carbide Ceramic Rings?
A: SiC ceramic rings are widely used in:
- Semiconductor manufacturing equipment
- CVD, PECVD, and PVD systems
- Wafer processing and handling equipment
- Epitaxial growth systems
- Vacuum furnaces
- High-temperature industrial equipment
- Photovoltaic manufacturing equipment
