Product Overview ——Central Air Conditioning Unit Greater Cooling Rate Industrial
Air-Cooled Modular Chiller
Chiller
The cleanroom chiller is a specialized HVAC auxiliary device that
serves clean production or experimental sites. It is characterized
by low - noise, low - vibration operation and meets the cleanliness
level requirements of the application scenario, ensuring the stable
operation of process equipment in the cleanroom.
Main Specification for Chiller
Cleanrooms typically require multiple, independent water systems with precise temperature control.
| System Name | Typical Supply Temp. | Primary Purpose | Critical Requirements |
| Process Cooling Water(PCW) | Medium Temp:~12℃ - 15℃ | Cools process equipment directly (ethtools,implanters,reactors) | Extreme stability:Temp.fluctuation≤±0.5℃ to ±0.1℃.Highest
reliability. |
| Ultrapure Water (UPW) Chilling | Low Temp:~7℃ - 9℃ | Cools UPW polishing loops to maintain water resistivity. | High-purity materials (SUS 316L,PVDF) to prevent ionic
contamination. |
| Low-Temperature Glycol Water | Chilled Fluid:~4℃ - 6℃ | Cools special process tools or controls dewpoint in dry processes. | Glycol-water mixture to prevent freezing.Precise temperature
control. |
| Reheat Hot Water | High Temp:~18℃ - 21℃ | Supplies reheat coils in AHUs for precision humidity control
(dehumidify & reheat). | Stable supply temperature for consistent space conditions. |
Note:A single chiller may serve one loop,or dual-temperature chillers
may supply both chilled and reheat water simultaneously.
Key Design Features for Cleanroom Compatibility
- Low-Particle Emission: Sealed components, closed-loop refrigerant circuits, and filtered
air intake prevent the release of dust, oil mist, or particulate
matter into the cleanroom. Many models use oil-free compressors to
eliminate oil contamination risks.
- Low Vibration & Noise: Mounted on vibration-dampening bases and equipped with
sound-insulated enclosures, these chillers minimize mechanical
vibrations that could disrupt sensitive processes (e.g., wafer
lithography) and reduce noise levels to meet cleanroom occupational
health standards.
- Precision Temperature Control: Advanced PID (Proportional-Integral-Derivative) controllers
maintain chilled water temperature within a narrow range (typically
±0.1°C to ±0.5°C), eliminating temperature fluctuations that could
compromise product quality or experimental results.
- Hygienic Construction: Stainless steel heat exchangers and water loops are used to
resist corrosion and bacterial growth, a key requirement for
pharmaceutical and biotechnology cleanrooms where sterility is
mandatory.
- Remote Monitoring & Control: Integrated IoT-enabled control systems allow real-time monitoring
of temperature, pressure, and operational status from a centralized
cleanroom management platform, enabling proactive maintenance and
reducing human intervention in the clean space.
Related Products
Company Profile
As a leading supplier of clean room system and clean room
products,SHP is an organization that prides itself both on
technical expertise as well as next level customer care.SHP offers
Cleanroom Solutions to meet our clients' particular requirements
specialized for pharmaceutical,biotechnology and microelectronic
cleanrooms.We also provide a range of Clean Room products including
wall panel,door&window and a series of clean room equipment.
As an ISO 9001:2015 certified organization,we are committed to
continually improving our customer service programs while meeting
or exceeding your product quality criteria.With our comprehensive
customer solution offerings,excellence in products,and decades of
technical expertise,we are confident that SHP can match the best to
your application.
Our Customers
Customer Photos
FAQ
Q1: Where is your company?
A1:Our company is located in Suzhou City, close to Shanghai. It's a
1.5-hour drive from PVG Airport.
Q2: Are you a manufacturer or a trading company? What can I buy
from you?
A2: We are manufacturers. We focus on cleanroom projects, air
showers, FFUs, through boxes, dosing rooms, laminar flow hoods and
benches, AHUs, and sealed doors and Windows.
Q3:When is your delivery time?
A3: If your cleanroom project includes AHU, the delivery time is 35
days. If you purchase goods without an AHU, the delivery time is 10
days.
Q4: How long is your warranty period? What kind of after-sales
service can you offer?
A4: Our warranty period is two years after the completion of the
project. During the warranty period, if there are any problems, we
will replace it. If you can't handle it, we will send an engineer
to solve it for free.
Q5:Can you conduct cleanroom validation?
A5: Yes, we can offer documentaries of DQ, IQ, OQ and PQ. Still fat
& Sitting. Product operation manual, maintenance guide and a
complete set of cleanroom drawings.
Q6:What are your advantages?
A6: We have a complete technical team consisting of 12 senior
cleanroom and HVAC engineers to provide you with technical support.
We have completed over 2,100 cleanroom projects in China and
overseas. Such as Japan, Indonesia, Thailand, Bangladesh, India,
North Macedonia, Saudi Arabia, Yemen, Russia, Moldova, Switzerland,
Norway, the United Kingdom, Spain, France, Belgium, Kuwait,
Tunisia, Mauritius, Sri Lanka, Mongolia, Philippines, Nepal, Sudan,
Somaliland, Australia, New Zealand, Canada, Algeria, Egypt,
Singapore, and the United States.
