AlN Templates

2 inch AlN Templates: Dimensions:Ф 50.8 mm ± 0.1 mm Substrate:Sapphire (Single Side Polished) Thickness:4 ~ 5 µm Orientation:C-plane (0001) ± 1° Conduction Type:Semi-Insulating Crystalline quality: XRD FWHM of (0002) < 350 arcsec. XRD FWHM of (10-12) < 450 arcsec Edge Exclusion zone:< 2 mm Surface Roughness:Ra < 5 nm (10 µm x 10 µm)