Wafer-Level Atomic Force Microscoperoscope

Wafer-Level Atomic Force Microscope Product Model: Atommax Product Overview: Using micro-cantilever probe structures, this instrument enables 3D morphology characterization of conductive, semiconductive, and insulating solid materials, achieving wafer-level large-sample morphology characterization. Combined with an optical image, the electrically driven sample positioning stage allows for 1 μm positioning accuracy within a 200 x 200 mm area. with fully automated operations

Brand Name Truth Instruments
Payment Terms T/T
Sample Size Compatible with 8-inch wafers and below
Place of Origin CHINA
Scan Speed 0.1Hz-30Hz
Price Price Negotiable | Contact us for a detailed quote
Product Description
Wafer-Level Atomic Force Microscope
Product Model:

Atommax

Product Overview:

Using micro-cantilever probe structures, this instrument enables 3D morphology characterization of conductive, semiconductive, and insulating solid materials, achieving wafer-level large-sample morphology characterization. Combined with an optical image, the electrically driven sample positioning stage allows for 1 μm positioning accuracy within a 200 x 200 mm area. with fully automated operations for laser alignment, probe approach, and scanning parameter adjust.ments.

Equipment Performance Specifications
Parameter Specification
Sample Size Compatible with 8-inch wafers and below
Scanning Range Maximum 100μm * 100μm * 910μm
Scanning Angle 0~360" 
Resolution Z-axis closed-loop resolution 0.15 nm; X/Y closed-loop resolution 0.5 nm
Scanning Probe XY Direction lmage Resolution Not less than 32x32~4000x4000
Operating Modes Contact mode, tapping mode, phase imaging mode, lift mode, multi-directional scanning mode
Multi-Function Measurement EFM,KFM,PFM,MFM

 

Application Cases

  • Potential of the Au-Ti strip electrode sheet
  • Scanning mode: KPFM (lift-mode)
  • Scanning range: 18μm * 18μmTitanium Film - Aluminum Titanate Film

  • Electrostatic force of the Au-Ti strip electrode sheet
  • Scanning mode: EFM (lift mode)
  • Scanning range: 18μm * 18μm

  • Magnetic domains in Fe-Ni thin films
  • Scanning mode: MFM (lift-mode)
  • Scanning range: 14μm * 14μm

  • PbTiO3-piezoelectric corresponding vertical amplitude image
  • Scanning mode: PFM (contact-mode)
  • Scanning range: 20μm * 20μm
 
Co/Pt Thin Film
  • Co/Pt Thin Film
  • Scanning Mode: Magnetic Force Microscopy (MFM)
  • Scanning Range: 25 μm * 25 μm

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