Semiconductor Oven SEO Series
Semiconductor Oven SEO Series Product Overview The Semiconductor Oven SEO Series features high capacity PID adjustment with excellent air tightness for nitrogen-filled environments. Designed for semiconductor wafer curing, IC packages, and glass substrates, this oven delivers superior temperature uniformity and stability. Key Specifications Attribute Value Model SEO-100N Dimension 1700(L)*1200(W)*1800(H)mm Weight 500-800kg Total Power 21KW Temperature Accuracy ±0.5℃
The Semiconductor Oven SEO Series features high capacity PID adjustment with excellent air tightness for nitrogen-filled environments. Designed for semiconductor wafer curing, IC packages, and glass substrates, this oven delivers superior temperature uniformity and stability.
| Attribute | Value |
|---|---|
| Model | SEO-100N |
| Dimension | 1700(L)*1200(W)*1800(H)mm |
| Weight | 500-800kg |
| Total Power | 21KW |
| Temperature Accuracy | ±0.5℃ |
| Temperature Range | Room temperature+10℃~250℃ |
- Horizontal Air Recirculation: High capacity system ensures superior temperature uniformity
- Fully Sealed Chamber: Stainless steel construction with excellent air tightness for nitrogen efficiency
- High Temperature Motor: Long-axis motor with large turbine blades for stable high-temperature operation
- Precision Control: PID adjustment with 0.5℃ accuracy and programmable process profiles
- Cleanroom Compatibility: Meets thousand-grade cleanroom standards for semiconductor production
- Oxygen Control: Dual channel analysis maintains oxygen content below 50PPM
Features upper and lower hot air circulation systems with adjustable airflow. Constructed with high-quality stainless steel and layered brackets for optimal space utilization.
Equipped with multiple flow meters and oxygen analyzers for real-time monitoring. Maintains oxygen content below 500PPM (option for 100PPM).
Water cooling with fin radiator blast technology reduces cooling time while preventing product damage from rapid temperature changes.
Includes over-temperature protection, oxygen content monitoring, nitrogen pressure alarms, electronic safety locks, and emergency stop switch.
Particle concentration ≤35,200 (0.5μm) meets thousand-class cleanroom standards.
High precision temperature control with PID regulation ensures uniform heat distribution.
| Parameter | Specification |
|---|---|
| Box Dimension | 700(L)*550(W)*(600*2)(H)mm |
| Working Mode | Two independent boxes (1-4 optional) |
| Temperature Uniformity | ±1.5%℃ (no-load) |
| Heating Time | ≤15min (200℃ no-load) |
| Cooling Rate | 2-5℃/min |
| Cleanliness Class | Class 1000 |
Gas Source: Nitrogen purity 99.999% at 0.5-0.8Mpa
Power: 380V 50/60HZ three phase five wire with 25mm² cable
Environment: 5-40℃ temperature range, 20-95% relative humidity
Floor Load: Minimum 1000kg/m²
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