Tungsten Filament Scanning Electron Microscope / Sem Electron Microscope EM69 Std
As KYKY over 60 years SEM manufacture experience, the whole EM series supports old system refurbished and customized system as SEM+, such as Electron Beam Lithography remodel, LaB6 upgrade,integrated with STM,AFM,Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator etc. System also has multiple interface at chamber for attaching most of the analysis detector in the market The EM69 series scanning electron microscope with excellent imaging, wide range of expansion
As KYKY over 60 years SEM manufacture experience, the whole EM series supports old system refurbished and customized system as SEM+, such as Electron Beam Lithography remodel, LaB6 upgrade,integrated with STM,AFM,Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator etc. System also has multiple interface at chamber for attaching most of the analysis detector in the market
Advanteges:
◆ Optional low vacuum modules(LVSE,LVBSE)
◆ Rich automation functions
◆ Column/Chamber/Electric System Customization
◆ Optional Big size chamber
◆ Wide field navigation camera
◆ Rich expanding attachments
Specifications:
| Item | EM6910 Tungsten Filament SEM | |
| Resolution | SE:3nm@30KV,8nm@3kV； BSE :4nm@30KV | |
| Magnification | 1x-450000x | |
| Electron Gun | Pre-aligned tungsten filament | |
| Accelerating Voltage |
0.2kV-30kV
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Vacuum system
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Turbo Molecular pump +mechanical pump
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| Objective Aperture | Molybdenum aperture adjustable outside vacuum system | |
| Specimen Stage | Five axes stage | |
| Travel | X(Auto) | 0 ~ 80mm |
| Range | Y(Auto) | 0 ~ 50mm |
| Z(Manual) | 0 ~ 30mm | |
| R(Manual) | 360° | |
| T(Manual) | -5° ~ 70° | |
| Max Specimen Diameter | 175mm | |
| Detector |
Secondary electron detector
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Semiconductor BSE detector※
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Infrared CCD
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Low-vacuum SED※/ Low-vacuum BSED ※
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| Modification | Stage Upgrade;EBL; STM; AFM; Heating Stage; Cryo Stage; Tensile Stage ; Micro-nano manipulator; SEM+Coating Machine;SEM+Laser | |
| Accessories | LaB6,X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine | |
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Low vacuum function※
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Vacuum level 10-270Pa SE:4nm@30kv,50Pa
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