ITO Film Magnetron Sputtering Coating Machine

ITO Film Coating Machine, Bath Type ITO film Magnetron Sputtering Coater /  Glass ITO Deposition Machine

ITO Film Coating Machine Standard applications: PET, glass, to generate ITO coating layers.

Machine Built Time: 2012, China.

Application: AR film, ITO film.

Work Pieces:

Size: 300mm*100mm

Thickness of PET: 0.175mm+/-0.05mm

*Thickness of ITO Film:185nm+/-5nm

Sheet resistance: 6~8ohm/sq

ITO Film Coating Machine Technical Configurations:

1) DC Sputtering Sources: Cu, Al, ITO

2) MF Sputtering Sources

3) Turbo Molecular pump + Backing Pump group

4) High-intensity magnetic field to improve ITO film quality, target utilization rate >30%

5) Cu, Al, Si targets utilization rate > 35%

6) Deposition Rate: 30nm m/min ~ 40nm m/min

7) Sputtering Uniformity Area: 350mm

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.