Mass Flow Sensors FS4001

FS4001 series mass flow sensors are manufactured using MEMS flow sensor and package technology. The sensors are specially designed for low flow rate range applications from 0 ~ 30 sccm up to 0 ~ 1000 sccm. The maximum flow rate for each model is manufactured via specially designed package as well as smart electronics so that the optimal sensitivity would be achieved. Features and Applications - Low mass flow range from 0 ~ 30 sccm up to 0 ~ 1000 sccm - Outstanding accuracy of