Developer Solution DS - 100

Developer Solution DS - 100

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description :

This is useful alkali type solution for photo resist and dry film.
1) Features
A) Non- slugging.
B) Resist resolves easily.
C) Simple to clean the developing chamber.
D) Easy Make - up because of liquidity.
2) Application
A) Make - up:1.6 % v/v DS - 100 Control extent:0.8 ~ 3 % v/L
B) Make - up:1.6 % v/L DS - 100 (1.5 ~ 2.0 %)
C) Temperature:25 ~ 35 deg C ( 29 deg C )
D) Break point:60 ~ 65 %
E) Spray pressure:1.0 ~ 2.0 kgf/sq M
F) Control/Replenishment: Panel counter method.
3) Standard Specifications
A) Appearance: No color & light smell.
B) Specific gravity:1.350 ~ 1.450/25 deg C
C) pH: More than 14
D) Periodical inspection: Once/6 month.
4) Compatible materials for the developing chamber
Polypropylene, Polyethylene, SUS316, TITAN, Vinyl chloride
5) Storage
Store in chemical container between 10 ~ 30 deg C (Avoid direct sunlight. )
Description of substance Single, Mixture: Mixture.
Chemical name: Potassium Carbonate 584-08-7 50 %
Additive below 10 %
Name of Hazardous toxicity clarification: Not applicable.
Toxicity: If inhaled, it stimulates the nose, throat and you may experience painful symptoms. Blindness can result due to wrong aid to eyes. This is a non - flammable solution.
Avoid close proximity to sulfuric acid at high temperatures from 10 ~ 30 deg C.
1993
1) Choking dust 2 mg/sq M K2CO3
2) Light dust 2 mg/sq M K2CO3
3) No standard additive
ACGIH1) Light dust 2 mg/sq M K2CO3
2) No standard additive
Physical/Chemical PropertiesAppearance: Transparent liquid with light smell.
Specific gravity:1.350 ~ 1.450/25 deg C
PH: More than 14
Solubility: It is liquid type so, it mixed up with at random rate.
Hazard Information
Flammable point: None Flammability: None
Explosive point: None Explosion: None
Explosion limit: None
The ignition point: None
- Japan Industrial Sanitary Association (1994), OHSA(1993 ), NTP (1994), IARC(1993)
Environmental
Information. K2CO3 Additive.
Decomposition: No data
Accumulation: No data
Poisoning: No data.
Reference
1) Van Waters and Rogers Ltd. MSDS
Canadian Center For Occupational Health and Safety (1990)
2) National Institute of Occupational Safety and Health, Registry of Toxic Effects of Chemical
Substances
Canadian Centre for Occupational Health and Safety (1991)
3) MSDS (1995)
4) Japan Chemicals. (1975)
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Developer Solution DS - 1